Introduction to VLSI process engineering /
Introduction to VLSI process engineering /
edited by the Society of Chemical Engineers of Japan ; editor in chief, Yuji Naka.
- London : Chapman & Hall, 1993.
- 210 p. : ill. ; 24 cm.
'The English language edition has been translated from the original Japanese publication: Introduction to VLSI processing for chemical engineers, Baifukan Co. Ltd., 1989'--T.p. verso.
References : p. 201-204.
engjpn
0412395509 RM157.25
Integrated circuits--Very larged scale integration--Design and construction.
Manufacturing processes.
'The English language edition has been translated from the original Japanese publication: Introduction to VLSI processing for chemical engineers, Baifukan Co. Ltd., 1989'--T.p. verso.
References : p. 201-204.
engjpn
0412395509 RM157.25
Integrated circuits--Very larged scale integration--Design and construction.
Manufacturing processes.