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Impurity doping processes in silicon /

Impurity doping processes in silicon / edited by F.F.Y. Wang. - Amsterdam : North-Holland, 1981. - 643 p. : ill. ; 23 cm. - Materials processing vol. 2. . - Materials processing vol. 2. .

Includes bibliographical references.

ISBN: 0444860959

Subjects--Topical Terms:
Semiconductor doping.

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